A very pure thin film tantalum phase
- 1 September 1971
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 8 (3) , R9-R12
- https://doi.org/10.1016/0040-6090(71)90112-x
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Phase composition and conductivity of sputtered tantalumThin Solid Films, 1970
- A NEW STRUCTURE IN TANTALUM THIN FILMSApplied Physics Letters, 1965