Advantages of heavy ions for high-resolution microscopy
- 1 March 1978
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 149 (1-3) , 475-481
- https://doi.org/10.1016/0029-554x(78)90911-4
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Design Study of a 200 KeV Scanning Proton Microprobe Using a Field Ionization SourceIEEE Transactions on Nuclear Science, 1976
- Collimation of ion beams to micrometer dimensionsNuclear Instruments and Methods, 1975
- High−spatial resolution Auger spectroscopy and Auger integration applicationsJournal of Vacuum Science and Technology, 1975
- Focused ion beams in microfabricationJournal of Applied Physics, 1974
- Biomedical Applications and Instrumental Implications of Ion MicroprobeIEEE Transactions on Nuclear Science, 1974
- Selective Area Metallization by Electron-Beam Controlled Direct Metallic DepositionJournal of Vacuum Science and Technology, 1973
- Trace element analysis by proton-induced X-ray excitationThe International Journal of Applied Radiation and Isotopes, 1973
- Proton microbeams, their production and useJournal of Radioanalytical and Nuclear Chemistry, 1972
- Electrical and physical measurements on silicon implanted with channelled and nonchanneled dopant ionsCanadian Journal of Physics, 1968
- Multiple Scattering of ProtonsPhysical Review B, 1958