Radical Beams Produced by Laser Ablation and Their Application
- 1 July 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (7S) , 4316-4319
- https://doi.org/10.1143/jjap.33.4316
Abstract
A variety of solid targets such as Al2O3, Si3N4, YBa2Cu3O x and polymers were ablated with an ArF or KrF excimer laser. Laser-induced fluorescence spectroscopy (LIF) was used to detect species ejected from ablated targets and to characterize their kinetic properties. An aluminum radical beam produced from Al2O3 was applied to the measurement of the reactive cross section of Al with oxygen gas and to the study of the radical-surface interaction.Keywords
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