Comparison of electron sources for high-resolution Auger spectroscopy in an SEM
- 1 December 1976
- journal article
- letter
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 47 (12) , 5464-5466
- https://doi.org/10.1063/1.322579
Abstract
The effect of primary beam current and electron spot size on the Auger image resolution and signal‐to‐noise ratio (S/N) have been determined for field emission and thermionic emission sources. It is demonstrated that by use of a FE source and nA primary beam currents, an Auger image resolution of less than 1000 Å can be obtained. The major limitation to Auger spatial resolution is attributed to backscattered electrons. A LaB6 source is clearly superior to FE sources at primary beam currents of greater than 1×10−8 A.This publication has 8 references indexed in Scilit:
- High−spatial resolution Auger spectroscopy and Auger integration applicationsJournal of Vacuum Science and Technology, 1975
- Auger emission from solids: the estimation of backscattering effects and ionization cross sectionsJournal of Physics D: Applied Physics, 1974
- Lanthanum Hexaboride Electron EmitterJournal of Applied Physics, 1972
- Auger Electron Spectroscopy in the Scanning Electron Microscope: Auger Electron ImagesApplied Physics Letters, 1971
- Monte Carlo Calculations of the Electron-Sample Interactions in the Scanning Electron MicroscopeJournal of Applied Physics, 1971
- NEW CONTRAST MECHANISM FOR SCANNING ELECTRON MICROSCOPEApplied Physics Letters, 1970
- Estimates of the Efficiencies of Production and Detection of Electron-Excited Auger EmissionJournal of Applied Physics, 1969
- A High-Resolution Scanning Transmission Electron MicroscopeJournal of Applied Physics, 1968