A critical evaluation of low-energy electron impact cross sections for plasma processing modeling. II: Cl4, SiH4, and CH4
- 1 December 1992
- journal article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 12 (4) , 477-493
- https://doi.org/10.1007/bf01447255
Abstract
No abstract availableKeywords
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