Design and simulation of an electrostatic micropump for drug-delivery applications
- 1 September 1997
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 7 (3) , 186-188
- https://doi.org/10.1088/0960-1317/7/3/028
Abstract
The design of a micropump employing only one valve is presented. This device was simulated by means of a model based on electrical analogies and equivalent networks. With a total size of , and a working voltage of 10 V, the device sizing gives flow rates in the 10 - 100 range, which are very suitable for drug-delivery applications.Keywords
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