A new condenser microphone with a p+ silicon membrane
- 1 March 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 31 (1-3) , 149-152
- https://doi.org/10.1016/0924-4247(92)80095-k
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- A new condenser microphone in siliconSensors and Actuators A: Physical, 1990
- Subminiature silicon integrated electret capacitor microphoneIEEE Transactions on Electrical Insulation, 1989
- Development of an electret microphone in siliconSensors and Actuators, 1989
- A subminiature condenser microphone with silicon nitride membrane and silicon back plateThe Journal of the Acoustical Society of America, 1989
- Silicon as a mechanical materialProceedings of the IEEE, 1982