A new condenser microphone in silicon
- 28 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 123-125
- https://doi.org/10.1016/0924-4247(90)85023-w
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- High-precision capacitative absolute pressure sensorSensors and Actuators, 1989
- The potential dependence of silicon anisotropic etching in KOH at 60°cJournal of Electroanalytical Chemistry and Interfacial Electrochemistry, 1987
- Silicon-dioxide electret transducerThe Journal of the Acoustical Society of America, 1984
- ZnO on Si integrated acoustic sensorSensors and Actuators, 1983