Statistics of Kinetic Secondary Electron Emission with Stochastic Elastic Collision of Ions in Solids

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Abstract
Electron emission statistics for H+ impact on Au in the energy range 1 keV-40 keV are investigated using a Monte Carlo calculation with the kinetic emission model. The factor f 0/ε evaluated by fitting the calculation to experimental electron yield increases with increasing impact energy, and it approaches an energy-independent value as recognized by many investigators because of the decrease of large-angle elastic scattering of H+ in Au (f 0: the transmission probability through the surface, ε: the average energy deposited to produce an electron). Special features of the emission statistics are a large probability to produce no electron for keV energy, a smaller probability for no electron with increasing energy, and higher (lower) yield than the inverse cosine law for tens keV (keV) with oblique incidence.