Deviation from an Inverse Cosine Dependence of Kinetic Secondary Electron Emission for Angle of Incidence at keV Energy

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Abstract
Incident angle dependence of kinetic secondary electron emission from metals resulting from incidence of keV ions is investigated by computer simulation with the TRIM Monte Carlo program of ion scattering in matter. The results show large deviations from the inverse cosine dependence, which derives from high-energy approximation, because of a series of elastic collisions of incident ions with metal atoms. In the keV energy region, the elastic collisions have two different effects on the angular dependence for relatively high-energy light ions and for low-energy heavy ions: they result in over- and under-inverse-cosine dependences, respectively. The properties are observed even with an experiment of the keV-neutral incidence on a contaminated surface. In addition, the effects of the thin oxide layer and roughness on the surface are examined with simplified models.