A Simple Method to Determine the Energy of keV Neutrals
- 1 June 1980
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 19 (6) , L281
- https://doi.org/10.1143/jjap.19.l281
Abstract
The incident angle dependence of secondary electron omission from a metal surface is experimentally investigated with keV neutral bombardment. A simple method is proposed by which the energy of neutrals is determined. By applying this method, it will be possible to estimate the absolute flux intensity of the neutrals with unknown energy distribution, and the ion temperature of a Maxwellian plasma.Keywords
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