Ion beam mixing of AlAlN multilayers for tribological and corrosion protection
- 1 January 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 80-81, 1415-1418
- https://doi.org/10.1016/0168-583x(93)90811-j
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- NRA and RBS analyses of silicon, aluminium and iron nitride thin filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- Modification of chemical properties by ion beam mixing techniquesVacuum, 1989
- Improvement of the Electrical Properties of the AlN/GaAs MIS System and Their Thermal Stability by GaAs Surface Stoichiometry ControlJapanese Journal of Applied Physics, 1988
- Synthesis of compound thin films by dual ion beam deposition. II. Properties of aluminum-nitrogen filmsJournal of Applied Physics, 1985