Model predictions of feature-size-dependent step coverages by PVD aluminum: surface diffusion
- 1 December 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 206 (1) , 54-58
- https://doi.org/10.1016/0040-6090(91)90392-b
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A fundamental feature scale model for low pressure deposition processesJournal of Vacuum Science & Technology A, 1991
- A unified line-of-sight model of deposition in rectangular trenchesJournal of Vacuum Science & Technology B, 1990
- Step coverage simulation and measurement in a dc planar magnetron sputtering systemJournal of Applied Physics, 1983