Piezoelectric ZnO transducers produced by r.f. magnetron sputtering
- 19 June 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 80 (1-3) , 183-195
- https://doi.org/10.1016/0040-6090(81)90222-4
Abstract
No abstract availableKeywords
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