Optimization of thin-film YBa/sub 2/Cu/sub 3/O/sub 7/ deposition by DC sputtering onto sapphire substrates
- 1 March 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Magnetics
- Vol. 25 (2) , 2530-2533
- https://doi.org/10.1109/20.92822
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- UHV sputter deposition with a research-scale DC magnetronJournal of Physics E: Scientific Instruments, 1988
- Laser evaporation deposition of superconducting and dielectric thin filmsApplied Physics Letters, 1988
- Preparation of superconducting Y-Ba-Cu-O films by a reactive plasma evaporation methodApplied Physics Letters, 1988
- Thin films of Y-Ba-Cu-O on silicon and silicon dioxideApplied Physics Letters, 1988
- I n s i t u preparation of Y-Ba-Cu-O superconducting thin films by magnetron sputteringApplied Physics Letters, 1988
- The Deposition, Fabrication and Characteristics of High Critical Temperature DevicesMRS Proceedings, 1987
- Preparation and characteristics of Nb/Al-oxide-Nb tunnel junctionsJournal of Applied Physics, 1985
- Resputtering effects in Ba(Pb, Bi)O3 perovskitesJournal of Vacuum Science and Technology, 1980
- Selective thermalization in sputtering to produce high TcfilmsIEEE Transactions on Magnetics, 1975
- Superconductivity in some new metastable film phasesJournal of Applied Physics, 1974