Self-Developing Characteristics of Nitrocellulose Exposed to Ion Beams
- 1 September 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (9A) , L1453
- https://doi.org/10.1143/jjap.26.l1453
Abstract
The self-developing and processing properties of nitrocellulose are investigated in comparison with other resists such as PMMA and PBS. It is found that only the nitrocellulose has the self-developing feature of the three resists, and that the self-developing rate of the nitrocellulose is independent of the polymerization grade of nitrocellulose, but is dependent on the nitrogen content in the nitrocellulose.Keywords
This publication has 4 references indexed in Scilit:
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