Investigation and compensation of the nonlinearity of heterodyne interferometers
- 1 April 1992
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 14 (2) , 91-98
- https://doi.org/10.1016/0141-6359(92)90054-z
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- Optical sources of non-linearity in heterodyne interferometersPrecision Engineering, 1990
- Non-linearity in length measurement using heterodyne laser Michelson interferometryJournal of Physics E: Scientific Instruments, 1987
- A new laser measurement system for precision metrologyPrecision Engineering, 1987
- Residual errors in laser interferometry from air turbulence and nonlinearityApplied Optics, 1987