Influence of sputtering target material on the formation of cubic BN thin films by ion beam enhanced deposition
- 31 March 1993
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 2 (2-4) , 512-516
- https://doi.org/10.1016/0925-9635(93)90111-e
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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