Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply
- 1 August 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 189 (1) , 125-138
- https://doi.org/10.1016/0040-6090(90)90033-a
Abstract
No abstract availableKeywords
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