Thickness-dependent thermal reliability of low-dielectric constant polycrystalline PTFE submicron dielectric thin films
- 1 March 2001
- journal article
- Published by Elsevier in Microelectronics Journal
- Vol. 32 (3) , 215-219
- https://doi.org/10.1016/s0026-2692(00)00125-7
Abstract
No abstract availableKeywords
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