Ion beam bonding of thin films
- 1 March 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 7-8, 881-885
- https://doi.org/10.1016/0168-583x(85)90488-4
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- Thin-film adhesion changes induced by electron irradiationApplied Physics Letters, 1984
- The use of fast heavy ions to improve thin film adhesionThin Solid Films, 1983
- Ion-beam-enhanced adhesion in the electronic stopping regionNuclear Instruments and Methods in Physics Research, 1982
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980