Nonstoichiometric germanium nitride. A new insulating material for MIS microelectronics. I. The choice of the insulator and deposition
- 16 July 1983
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 78 (1) , 115-123
- https://doi.org/10.1002/pssa.2210780113
Abstract
No abstract availableKeywords
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