Microelectromechanical deformable mirrors
- 1 January 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Selected Topics in Quantum Electronics
- Vol. 5 (1) , 83-89
- https://doi.org/10.1109/2944.748109
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Development of microelectromechanical deformable mirrors for phase modulation of lightOptical Engineering, 1997
- Flexible mirror micromachined in siliconApplied Optics, 1995
- Fabrication and characterization of a micromachined deformable mirror for adaptive optics applicationsPublished by SPIE-Intl Soc Optical Eng ,1993