Electron microscopical analysis of the stacking fault behaviour in inert-gas annealed Czochralski silicon
- 1 January 1983
- book chapter
- Published by Springer Nature
- p. 134-139
- https://doi.org/10.1007/3-540-11986-8_11
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- Characterization of structural defects in annealed silicon containing oxygenJournal of Applied Physics, 1976
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