Application of high energy implantation in semiconductors
- 1 May 1988
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 268 (2-3) , 579-588
- https://doi.org/10.1016/0168-9002(88)90581-5
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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