Substrate temperature in thin film deposition
- 1 January 1969
- Vol. 19 (3) , 121-122
- https://doi.org/10.1016/s0042-207x(69)90115-8
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- A substrate heater for use in the vacuum deposition of thin filmsJournal of Physics E: Scientific Instruments, 1968
- Temperature Changes in Thin Metal Films during Vapor DepositionJournal of Applied Physics, 1967
- An ultrahigh vacuum system for the preparation and study of surface properties of cadmium sulphide thin filmsVacuum, 1967
- Substrate-Temperature Measurement and ControlJournal of Vacuum Science and Technology, 1966
- Defects in epitaxial films of semiconducting compounds with the sphalerite structureJournal of Materials Science, 1966
- The preparation and performance of thin film thermocouplesJournal of Scientific Instruments, 1966
- Hall-effect studies in deposited CdS thin filmsProceedings of the IEEE, 1964
- Crystallinity and Electronic Properties of Evaporated CdS FilmsJournal of Applied Physics, 1963
- CdS thin-film electron devicesSolid-State Electronics, 1963