The ejection of atomic particles from ion bombarded solids

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Abstract
Considerable interest has developed in the last decade in the study of atomic collisions in solids, particularly single crystal solids. This has been heightened by the observation of channelling and the interest in industrial aspects of ion implantation. In the following article, we present an up-to-date account of the work being done on the particles ejected from a single crystal, following ion bombardment. These particles include sputtered atoms and ions, scattered atoms and ions and secondary electrons. An attempt has been made to indicate the similarities and differences, particularly between the energy and angular distributions of these ejected particles. The major link involving the dependence of these distributions of all particles on crystallography is stressed.

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