Low Hydrogen Content, High Quality Hydrogenated Amorphous Silicon Grown by Hot-Wire CVD
- 1 January 1999
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Mechanisms influencing “hot-wire” deposition of hydrogenated amorphous siliconJournal of Applied Physics, 1997
- Properties of hydrogenated amorphous silicon produced at high temperatureAIP Conference Proceedings, 1992