Structural and electrical characterization of sputter-deposited SrTiO3 thin films
- 31 December 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 29 (1-4) , 123-127
- https://doi.org/10.1016/0167-9317(95)00129-8
Abstract
No abstract availableKeywords
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