Phosphorus Diffusion in Amorphous Silicon
- 16 January 1984
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 81 (1) , K15-K18
- https://doi.org/10.1002/pssa.2210810151
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Structure of Amorphous Silicon and Silicon HydridesPhysical Review Letters, 1980
- Small-Angle-Scattering Evidence of Voids in Hydrogenated Amorphous SiliconPhysical Review Letters, 1979
- Diffusion in a Pd-Cu-Si metallic glassApplied Physics Letters, 1978
- Intrinsic Diffusion of Boron and Phosphorus in Silicon Free From Surface EffectsPhysical Review B, 1971
- Evidence of Voids Within the As-Deposited Structure of Glassy SiliconPhysical Review Letters, 1969
- Defects in Irradiated Silicon: Electron Paramagnetic Resonance and Electron-Nuclear Double Resonance of the Si-CenterPhysical Review B, 1964