Modular Electron Beam Source for Thin Film Deposition
- 1 October 1966
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 37 (10) , 1421-1422
- https://doi.org/10.1063/1.1720010
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Influence of Electric Field on the Growth of Thin Metal FilmsJournal of Applied Physics, 1966
- Nucleation of Thin FilmsNature, 1966
- GROWTH OF THIN METAL FILMS UNDER APPLIED ELECTRIC FIELDApplied Physics Letters, 1965
- Focused-Beam Electron Bombardment EvaporatorReview of Scientific Instruments, 1965
- Growth of epitaxial silicon layers by vacuum evaporationPhilosophical Magazine, 1964
- Structure et pouvoir réflecteur des couches de silicium obtenues par évaporation sous videJournal de Physique et le Radium, 1959