Linnik microscope imaging of integrated circuit structures
- 1 January 1996
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 35 (1) , 131-148
- https://doi.org/10.1364/ao.35.000131
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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