Preparation of Bi-Sr-Ca-Cu-O Superconducting Films by CVD
- 1 May 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (5A) , L827
- https://doi.org/10.1143/jjap.28.l827
Abstract
Bi-Sr-Ca-Cu-O (BSCCO) films were prepared on MgO(100) single-crystal substrates at 770°C by chemical vapor deposition using β-diketone metal chelates of Sr, Ca and Cu and Bi-triethoxide. The films were Bi2(Sr, Ca)3Cu2O x (c=30 Å) with c-axis orientation. The films showed superconducting transition onset at 90 K with zero resistivity at 74 K. The formation of films having high-T c phase (Bi2(Sr, Ca)4Cu3O x , c=37 Å) was achieved when the films were annealed at 890°C for 5 h under 760 Torr of oxygen. The resistivity of the annealed films began to drop sharply at around 110 K and reached zero at 77 K.Keywords
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