Pulsed electron beam for silicon annealing
- 31 December 1982
- Vol. 32 (1) , 9-10
- https://doi.org/10.1016/s0042-207x(82)80188-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Compounds in the Pd-Si and Pt-Si system obtained by electron bombardment and post-thermal annealingJournal of Applied Physics, 1981
- Dynamics of laser-induced formation of palladium silicideApplied Physics Letters, 1979
- Laser annealing of boron-implanted siliconApplied Physics Letters, 1978