Electron-Beam-Induced Structuring of Composite Oxides by means of Dipping Pyrolysis of Metal Naphthenate Films
- 1 August 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (8A) , L1143
- https://doi.org/10.1143/jjap.31.l1143
Abstract
We have found that metal naphthenate thin films reacted with an energized electron beam of 30 keV and that the structured metal naphthenate in the submicron range could be prepared through the development of electron-irradiated samples using the organic solvent, toluene. The electron beam sensitivity of the metal naphthenate films was about 2×10-3 C/cm2, which showed higher sensitivity than that of the electron beam induced chemical vapour deposition but lower than that of PMMA resist. After the heat treatment at 450°C for 20 minutes, submicron patterns of the composite oxide, consisting of a few kinds of oxides, were prepared.Keywords
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