Heavy ion backscattering spectrometry for high sensitivity
- 1 June 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 79 (1-4) , 457-459
- https://doi.org/10.1016/0168-583x(93)95387-k
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Evaluation of surface analysis methods for characterization of trace metal surface contaminants found in silicon integrated circuit manufacturingJournal of Vacuum Science & Technology A, 1992
- Performance of a time-of-flight spectrometer for thin film analysis by medium energy ion scatteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
- Heavy-ion backscattering spectrometry (HIBS) for high-sensitivity surface impurity detectionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
- Heavy ion backscattering spectrometry (HIBS) — An improved technique for trace element detectionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989