Heavy-ion backscattering spectrometry (HIBS) for high-sensitivity surface impurity detection
- 1 January 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 45 (1) , 143-146
- https://doi.org/10.1016/0168-583x(90)90804-4
Abstract
No abstract availableKeywords
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