Indium nitride thin films prepared by radio-frequency reactive sputtering
- 15 November 1994
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 76 (10) , 5809-5812
- https://doi.org/10.1063/1.358480
Abstract
Indium nitride thin films were obtained by the reactive sputtering method. The metallic indium target was sputtered by nitrogen gas with rf magnetron sputtering equipment. The stoichiometric indium nitride film showed high Hall mobility (363 cm2 (V s)−1) and low carrier concentration (5.98×1018 cm−3). To suppress the nitrogen vacancies, the reevaporation of atomic nitrogen from the substrate must be suppressed by lowering the substrate temperature and the resputtering of atomic nitrogen must be minimized by adjusting the total pressure close to the upper limit of the effective pressure for deposition.This publication has 4 references indexed in Scilit:
- Morphology and structure of indium nitride filmsApplications of Surface Science, 1985
- Mechanisms of reactive sputtering of indium I: Growth of InN in mixed Ar-N2 dischargesThin Solid Films, 1980
- Some properties of inn films prepared by reactive evaporationJournal of Electronic Materials, 1974
- Electrical and Optical Properties of rf-Sputtered GaN and InNApplied Physics Letters, 1972