Direct evidence of micropipe-related pure superscrew dislocations in SiC
- 18 January 1999
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 74 (3) , 353-355
- https://doi.org/10.1063/1.123069
Abstract
A set of powerful x-ray imaging techniques using white-beam synchrotron radiation have been developed and applied to clearly reveal and map micropipes in SiC crystals at a “magnified” level. The experimental results and the corresponding simulations demonstrate explicitly that the micropipes are pure superscrew dislocations (SSDs). Moreover, these techniques provide accurate descriptions of the detailed structure of the SSDs, including the spatial distribution of the strain fields, the magnitudes of the Burgers vectors, the dislocation senses, and the surface relaxation effects.Keywords
This publication has 10 references indexed in Scilit:
- Dislocation Content of Micropipes in SiCPhysical Review Letters, 1998
- Micropipes: Hollow Tubes in Silicon CarbidePhysica Status Solidi (a), 1997
- Quantitative analysis of screw dislocations in 6H−SiC single crystalsIl Nuovo Cimento D, 1997
- White-beam synchrotron topographic studies of defects in 6H-SiC single crystalsJournal of Physics D: Applied Physics, 1995
- Large-band-gap SiC, III-V nitride, and II-VI ZnSe-based semiconductor device technologiesJournal of Applied Physics, 1994
- Performance limiting micropipe defects in silicon carbide wafersIEEE Electron Device Letters, 1994
- An optical and X-ray topographic study of giant screw dislocations in silicon carbideJournal of Crystal Growth, 1985
- On giant screw dislocations in ZnS polytype crystalsPhilosophical Magazine, 1971
- A dislocation at a free surfacePhilosophical Magazine, 1961
- CXL. Dislocations in thin platesJournal of Computers in Education, 1951