Optical properties of carbon films deposited using a hybrid physical vapour deposition technique
- 31 August 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 47 (1-3) , 327-335
- https://doi.org/10.1016/0257-8972(91)90298-b
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Physical properties of carbon films produced using a hybrid physical vapour deposition techniqueSurface and Coatings Technology, 1991
- Graphite formation in diamond film depositionJournal of Vacuum Science & Technology A, 1989
- rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applicationsJournal of Applied Physics, 1983