High-Q vertically coupled InP microdisk resonators
- 7 August 2002
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 14 (3) , 331-333
- https://doi.org/10.1109/68.986803
Abstract
High-quality factor vertically coupled InP microdisk resonators have been fabricated. Wafer bonding techniques have been used as a main approach to enable this three-dimensional structure. The devices exhibit smooth sidewalls, single mode operation, and high-quality factors in excess of 7000.Keywords
This publication has 5 references indexed in Scilit:
- Vertically coupled microring resonators using polymer wafer bondingIEEE Photonics Technology Letters, 2001
- Coupling of modes analysis of resonant channel add-drop filtersIEEE Journal of Quantum Electronics, 1999
- Vertical resonant couplers with precise coupling efficiency control fabricated by wafer bondingIEEE Photonics Technology Letters, 1999
- An eight-channel add-drop filter using vertically coupled microring resonators over a cross gridIEEE Photonics Technology Letters, 1999
- Microring resonator channel dropping filtersJournal of Lightwave Technology, 1997