High dose metal ion implantation
- 1 April 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 40-41, 567-570
- https://doi.org/10.1016/0168-583x(89)91047-1
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Metal vapor vacuum arc ion sourceReview of Scientific Instruments, 1986
- Ion implantation in metals and ceramicsInternational Materials Reviews, 1986
- High current ion sourceApplied Physics Letters, 1985
- Study of electrode products emitted by vacuum arcs in form of molten metal particlesJournal of Applied Physics, 1975
- Plasma expansion as a cause of metal displacement in vacuum-arc cathode spotsJournal of Applied Physics, 1974