Polycrystalline silicon film thickness measurement from analysis of visible reflectance spectra
- 1 August 1979
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America
- Vol. 69 (8) , 1143-1152
- https://doi.org/10.1364/josa.69.001143
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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