Surface-micromachined mirrors for laser-beam positioning
- 30 April 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 52 (1-3) , 76-80
- https://doi.org/10.1016/0924-4247(96)80128-2
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Optoelectronic packaging using silicon surface-micromachined alignment mirrorsIEEE Photonics Technology Letters, 1995
- Three-dimensional micro-Fresnel opticalelements fabricated by micromachining techniqueElectronics Letters, 1994
- Microfabricated hingesSensors and Actuators A: Physical, 1992
- Electrostatic-comb drive of lateral polysilicon resonatorsSensors and Actuators A: Physical, 1990