Improved quality of zinc oxide thin films byin situannealing
- 1 March 1996
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 6 (1) , 63-65
- https://doi.org/10.1088/0960-1317/6/1/013
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Acoustic AccelerometersIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1987
- Zinc Oxide Films for Acoustoelectric Device ApplicationsIEEE Transactions on Sonics and Ultrasonics, 1985
- Position and pressure effects in rf magnetron reactive sputter deposition of piezoelectric zinc oxideJournal of Applied Physics, 1984