Electron diffraction from areas less than 3 nm in diameter
- 15 August 1975
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 27 (4) , 174-176
- https://doi.org/10.1063/1.88417
Abstract
A method of obtaining rocking‐beam microarea electron diffraction patterns is described employing the electron optics of a single‐field condenser‐objective lens in a commercial scanning transmission electron microscope. Theoretical and experimental evidence is presented showing that it is possible to obtain diffraction patterns from areas less than 3 nm in diameter with minimum lattice spacings of 0.14 nm. This is demonstrated with a specimen consisting of small gold particles evaporated on a carbon substrate.Keywords
This publication has 2 references indexed in Scilit:
- A new scanning microdiffraction techniqueApplied Physics Letters, 1973
- The generation and identification of SEM channelling patterns from 10 μm selected areasJournal of Materials Science, 1971