Quantitative X-ray analysis of interdiffusing Ta/Si multilayer structures
- 1 April 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 199 (2) , 343-350
- https://doi.org/10.1016/0040-6090(91)90016-q
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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