Automated luminescent topographic system
- 1 June 1978
- journal article
- conference paper
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 49 (6) , 718-721
- https://doi.org/10.1063/1.1135600
Abstract
A new optical‐scanning technique with a spatial resolution of 10 μm has been developed for the observation of surface luminescence. The photoluminescence topographic technique is a fully automated system capable of measuring luminescence intensity from a surface area as large as 25.8 cm3 as well as the actual luminescence spectra from a spot as small as 10 μm in diameter. The system consists of an Ar‐ion laser for excitation, a bidirectional scanner with focusing lens, a spectrometer for high spectral resolution, and a photomultiplier for photon counting. Experimental control and data acquisition and display are performed by a Hewlett‐Packard 9820A calculator and interface package. Applications of the technique in the analysis of impurity segregation in semiconductor wafers are illustrated.Keywords
This publication has 1 reference indexed in Scilit:
- Determination of concentrations of donors and acceptors in GaAs by an optical methodApplied Physics Letters, 1977