Bias-induced junction displacements in scanning spreading resistance microscopy and scanning capacitance microscopy
- 1 March 2003
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 21 (2) , 737-743
- https://doi.org/10.1116/1.1547724
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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