Quantitative analysis of on bevel electrical junction shifts due to carrier spilling effects
- 24 December 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 57 (26) , 2856-2858
- https://doi.org/10.1063/1.103761
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Between carrier distributions and dopant atomic distribution in beveled silicon substratesJournal of Applied Physics, 1982
- An Anomalous Effect in Angle Lapping and Staining Ion‐Implanted LayersJournal of the Electrochemical Society, 1981